Panoptes RCA collects all relevant manufacturing information from scattered databases and uses state-of-the-art time series machine learning techniques to analyze them in an integrated manner. It quickly and accurately identifies the root cause of the alarm based on anomaly analysis with different data types such as machine sensor data and sampled metrology data. It displays analysis results on a comprehensive and easy-to-understand dashboard. Panoptes RCA also provides actionable guidelines learned from historical corrective actions that process engineers have taken under similar circumstances.